Apparatus and method for embossing micro- and/or nanostructures

• Main Authors: LUKSCH, OTHMAR, LINDNER, FRIEDRICH PAUL, SCHON, CHRISTIAN, GLINSNER, THOMAS, REISINGER, EVELYN, FISCHER, PETER, ZAGLMAYR, HARALD
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2018
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

An apparatus and a method for embossing micro- and/or nanostructures is hereby proposed.