Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
Described herein are architectures, platforms and methods for acquiring optical emission spectra from an optical emission spectroscopy system by flowing a dry cleaning gas into a plasma processing chamber of the plasma processing system and igniting a plasma in the plasma processing chamber to initi...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.01.2018
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Subjects | |
Online Access | Get full text |
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Summary: | Described herein are architectures, platforms and methods for acquiring optical emission spectra from an optical emission spectroscopy system by flowing a dry cleaning gas into a plasma processing chamber of the plasma processing system and igniting a plasma in the plasma processing chamber to initiate the waferless dry cleaning process. |
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Bibliography: | Application Number: TW20176110455 |