Appearance inspection apparatus

An appearance inspection apparatus for inspecting a top surface and at least one side surface bordered on the top surface of at least one chip is provided. The chip is disposed on an expandable film. The appearance inspection apparatus includes at least one reflecting mirror, a photography unit, and...

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Bibliographic Details
Main Authors TSAI, CHEN-YANG, CHOU, MING-HAO, HSIEH, HUANUN
Format Patent
LanguageChinese
English
Published 16.10.2017
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An appearance inspection apparatus for inspecting a top surface and at least one side surface bordered on the top surface of at least one chip is provided. The chip is disposed on an expandable film. The appearance inspection apparatus includes at least one reflecting mirror, a photography unit, and a computing unit. The reflecting mirror is corresponding to at least one side surface of the at least one chip. The photography unit for photographing image of the top surface of the at least one chip directly, and photographing image of the at least one side surface of the at least one chip via the at least one reflecting mirror indirectly. The computing unit coupled to the photography unit to analyze the images of the top surface and the at least one side surface of the at least one chip.
Bibliography:Application Number: TW20160110787