Electron microscope

• Main Authors: TSENG, YING-SHUO, LIU, SHIH-YI, CHEN, I-JIUN, YANG, LIIAO, HUANG, TSU-WEI, CHEN, FU-RONG, FANG, JIAN-MIN, CHEN, CHIH-WEI, HUANG, YU-SHAN, LIN, HSIN-YU, HSU, CHIN-LIANG
• Format: Patent
• Language: Chinese; English
• Published: 16.09.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

An electron microscope comprises: a charged particle beam generator, a detector, a film and a loading unit. The charged particle beam generator generated a first charged particle beam to bomb an analyze. The detector detects a second charged particle beam from the analyze to form an image. The film disposes on the downstream of the charged particle beam generator and has a first surface and a second surface. The space between the charged particle beam generator and the first surface of the film is a vacuum space. The loading unit disposes on the second surface side of the film and has a loading surface and a back surface. The analyze disposes on the loading surface and the distance between the analyzed surface of the analyze and the film is less than a predetermined gap. There is a liquid space between the analyzed surface and the film to fill liquid.