Process for preparing octachlorotrisilane and higher polychlorosilanes with utilization of hexachlorodisilane

The invention relates to a process and an apparatus for controlled preparation of octachlorotrisilane and higher polychlorosilanes such as DCTS and DCPS from monomeric chlorosilanes, by exposing the chlorosilanes to a nonthermal plasma and recycling chlorosilanes that have not been converted to octa...

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Bibliographic Details
Main Authors TROCHA, MARTIN, RAULEDER, HARTWIG, LANG, JUERGEN ERWIN, MOUSSALLEM, IMAD, BRAUSCH, NICOLE
Format Patent
LanguageChinese
English
Published 01.03.2017
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:The invention relates to a process and an apparatus for controlled preparation of octachlorotrisilane and higher polychlorosilanes such as DCTS and DCPS from monomeric chlorosilanes, by exposing the chlorosilanes to a nonthermal plasma and recycling chlorosilanes that have not been converted to octachlorotrisilane into the plasma.
Bibliography:Application Number: TW20160112845