Film bulk acoustic resonator filter

• Main Authors: DROR, HURWITZ, HUANG, ALEX SHI-FU
• Format: Patent
• Language: Chinese; English
• Published: 16.02.2017
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

An acoustic resonator comprises: a substantially horizontal piezoelectric membrane having an upper metal electrode and a lower metal electrode on the upper and lower surfaces thereof. The peripheral portion of the membrane is attached to the inner side wall of a rectangular interconnect frame by an adhesive polymer. The side walls of a package frame are substantially perpendicular to the membrane and have conductive vias provided in a dielectric matrix. The conductive vias extend substantially vertically in the side walls. The metal electrodes are electrically coupled to the metal vias by a feature layer over the upper surface of the membrane and upper and lower lids coupled to the upper and lower ends of the interconnect frame to seal the acoustic resonator from the surroundings thereof.