High surface resistivity electrostatic chuck and method of manufacturing the same

In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to. electrostatically clamp a substrate to the electrostatic chuck, the...

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Bibliographic Details
Main Authors BLAKE, JULIAN, STONE, DALE K, COOKE, RICHARD A, SUURONEN, DAVID, STONE, LYUDMILA
Format Patent
LanguageChinese
English
Published 01.11.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to. electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.
Bibliography:Application Number: TW20165119908