Method of processing a substrate

A method of processing a substrate or panel is disclosed. A substrate having thereon an array of chips is provided. A mask layer is laminated on the substrate. The mask layer has a plurality of openings to reveal active areas of the chips respectively. A spray-coating process is then performed to fo...

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Main Authors LU, HUNGIEH, TSENG, HOIEH, HUANG, YEN-HENG, CHUANG, WEIUNG, CHEN, CHUNG-KAI, TSENG, CHUN-LIN, CHENG, LI-TING, HUANG, CHANG-KUEI, CHEN, CHIOUI, HUANG, SHIHIEH
Format Patent
LanguageChinese
English
Published 01.06.2016
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Summary:A method of processing a substrate or panel is disclosed. A substrate having thereon an array of chips is provided. A mask layer is laminated on the substrate. The mask layer has a plurality of openings to reveal active areas of the chips respectively. A spray-coating process is then performed to form an adhesive film in the active areas. The mask layer is then stripped off.
Bibliography:Application Number: TW20143141265