Permeability evaluation method

A permeability evaluation method for evaluating the permeability of a test piece with respect to heavy-metal ions. Said permeability evaluation method includes a step in which, with a first liquid that contains heavy-metal ions and a second liquid that contains water and an organic solvent separated...

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Bibliographic Details
Main Authors SUZUMURA, KOJI, MURAHASHI, TOMOKO, YAMAMOTO, KAZUHIRO
Format Patent
LanguageChinese
English
Published 16.12.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A permeability evaluation method for evaluating the permeability of a test piece with respect to heavy-metal ions. Said permeability evaluation method includes a step in which, with a first liquid that contains heavy-metal ions and a second liquid that contains water and an organic solvent separated by the test piece, a voltage is applied between a positive electrode provided on the first-liquid side and a negative electrode provided on the second-liquid side and the amount of current flowing between said electrodes is measured. The test piece contains an insulating material used in semiconductor manufacturing, and the concentration of heavy-metal ions in the first liquid is at least 0.5 mg/kg.
Bibliography:Application Number: TW20154111852