Beam delivery apparatus and method

A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form one or more branch radiation beams for provision to one o...

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Main Authors AMENT, LUCAS JOHANNES PETER, LOOPSTRA, ERIK ROELOF, NIKIPELOV, ANDREY ALEXANDROVICH, NIENHUYS, HAN-KWANG, KRUIZINGA, BORGERT, BANINE, VADIM YEVGENYEVICH, FRIJNS, OLAV WALDEMAR VLADIMIR, DE JAGER, PIETER WILLEM HERMAN, DONKER, RILPHO LUDOVICUS, RENKENS, MICHAEL JOZEF MATHIJS, VAN GORKOM, RAMON PASCAL, BARTRAIJ, PETRUS RUTGERUS, GRIMMINCK, LEONARDUS ADRIANUS GERARDUS, DE VRIES, GOSSE CHARLES, JANSSEN, FRANCISCUS JOHANNES JOSEPH, KATALENIC, ANDELKO, ENGELEN, WOUTER JOEP
Format Patent
LanguageChinese
English
Published 16.06.2015
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Abstract A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form one or more branch radiation beams for provision to one or more tools.
AbstractList A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form one or more branch radiation beams for provision to one or more tools.
Author AMENT, LUCAS JOHANNES PETER
DE VRIES, GOSSE CHARLES
KATALENIC, ANDELKO
GRIMMINCK, LEONARDUS ADRIANUS GERARDUS
NIENHUYS, HAN-KWANG
NIKIPELOV, ANDREY ALEXANDROVICH
FRIJNS, OLAV WALDEMAR VLADIMIR
RENKENS, MICHAEL JOZEF MATHIJS
ENGELEN, WOUTER JOEP
BANINE, VADIM YEVGENYEVICH
DE JAGER, PIETER WILLEM HERMAN
BARTRAIJ, PETRUS RUTGERUS
KRUIZINGA, BORGERT
DONKER, RILPHO LUDOVICUS
JANSSEN, FRANCISCUS JOHANNES JOSEPH
VAN GORKOM, RAMON PASCAL
LOOPSTRA, ERIK ROELOF
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– fullname: KRUIZINGA, BORGERT
– fullname: BANINE, VADIM YEVGENYEVICH
– fullname: FRIJNS, OLAV WALDEMAR VLADIMIR
– fullname: DE JAGER, PIETER WILLEM HERMAN
– fullname: DONKER, RILPHO LUDOVICUS
– fullname: RENKENS, MICHAEL JOZEF MATHIJS
– fullname: VAN GORKOM, RAMON PASCAL
– fullname: BARTRAIJ, PETRUS RUTGERUS
– fullname: GRIMMINCK, LEONARDUS ADRIANUS GERARDUS
– fullname: DE VRIES, GOSSE CHARLES
– fullname: JANSSEN, FRANCISCUS JOHANNES JOSEPH
– fullname: KATALENIC, ANDELKO
– fullname: ENGELEN, WOUTER JOEP
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Snippet A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a...
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SubjectTerms APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Title Beam delivery apparatus and method
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