Copper ball bond interface structure and formation

An integrated circuit copper wire bond connection is provided having a copper ball (32) bonded directly to an aluminum bond pad (31) formed on a low-k dielectric layer (30) to form a bond interface structure for the copper ball characterized by a first plurality of geometric features to provide ther...

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Main Authors SONG, MEI-JIANG, TRAN, TU-ANH N, ARTHUR, JOHN G, ZAPICO, MATTHEW J, YAP, JIA LIN, LEE, CHUUNG, AU, YIN KHENG, SIONG, CHIN TECK
Format Patent
LanguageChinese
English
Published 01.06.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An integrated circuit copper wire bond connection is provided having a copper ball (32) bonded directly to an aluminum bond pad (31) formed on a low-k dielectric layer (30) to form a bond interface structure for the copper ball characterized by a first plurality of geometric features to provide thermal cycling reliability, including an aluminum minima feature (Z1, Z2) located at an outer peripheral location (42) under the copper ball to prevent formation and/or propagation of cracks in the aluminum bond pad.
Bibliography:Application Number: TW20143132669