Testing apparatus and method for microcircuit and wafer level IC testing
The test system provides an array of test probes having a cross beam. The probes pass through a first or upper probe guide retainer which has a plurality of slot sized to receive the probes in a way that they cannot rotate. The probes are biased upwardly through the retainer by an elastomeric block...
Saved in:
Main Authors | , , , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
01.04.2015
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The test system provides an array of test probes having a cross beam. The probes pass through a first or upper probe guide retainer which has a plurality of slot sized to receive the probes in a way that they cannot rotate. The probes are biased upwardly through the retainer by an elastomeric block having a similar array of slots. The elastomer is then capped at its bottom by a second or lower retainer with like slots to form a sandwich with the elastomer therebetween. The bottom ends of the probes are group by probe height. A plurality of flex circuits at the different heights engage bottom probe ends at their respective height levels and take continue the circuits to a probe card where test signals originate. |
---|---|
Bibliography: | Application Number: TW20140123964 |