Film thickness uniformity control method of imprint system

• Main Authors: CHEN, ZAN-REN, SHI, ZHI-HUA, QIU, JIAN-QING
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2015
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; PERFORMING OPERATIONS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

The invention provides a film thickness uniformity control method of an imprint system. The method comprises at least providing an imprint system and a bed plate. The imprint system comprises an imprint soft mold, a carrier and an air supply control device. Next, the carrier is used to carry the bed plate. Then, the working area of imprint soft mold provides a colloid. And then the carrier and the imprint soft mold are pressed together each other, so that the bed plate is close pressed to the colloid. And the air supply control device provides a positive pressurized gas to the air channel of the carrier, so that some portions of the bed plate is deformed to press the colloid to control the uniformity of an imprint film thickness formed on the bed plate. The imprint mold is formed by colloid. Finally, the air control supply equipment is stopped to provide the positive pressurized gas.