Manufacturing method of polishing pad dresser of sapphire disc

A manufacturing method of polishing pad dresser of sapphire disc comprises the following steps: providing a sapphire wafer having a specific axis direction; the specific axis direction being one of a axis direction, c axis, r axis, m axis, n axis and v axis; using a screen plate to transfer a transf...

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Bibliographic Details
Main Authors DAI, JUN-HAN, DAI, ZI-XUAN, WEI, KUANG-LING
Format Patent
LanguageChinese
English
Published 01.02.2015
Subjects
COLOUR PRINTING
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
LINING MACHINES
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
PRINTING
PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:A manufacturing method of polishing pad dresser of sapphire disc comprises the following steps: providing a sapphire wafer having a specific axis direction; the specific axis direction being one of a axis direction, c axis, r axis, m axis, n axis and v axis; using a screen plate to transfer a transfer pattern to at least one surface of the sapphire wafer by way of screen printing, and solidifying the transfer pattern through a solidification means; and performing an etching process to form a plurality of microstructures having a specific shape on the surface of the sapphire wafer. The microstructure is dressing grains of the polishing pad dresser.
Bibliography:Application Number: TW20130127168