Crucible material amount measuring device, method and evaporation machine

• Main Authors: LIN, CHINIH, HUANG, CHUN-YUN, CHOU, HAO-YU
• Format: Patent
• Language: Chinese; English
• Published: 16.01.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention discloses a crucible material amount measuring device, method and evaporation machine. The crucible material amount measuring device includes: a weighing module including a plurality of sensors for sensing the crucible in weight attached to the bottom of the crucible; a computing module for receiving sensed data transmitted from the plurality of sensors so as to calculate a residual amount of material; a control module for comparing the residual amount of material calculated by the computing module with a predetermined residual amount of material. When the calculated residual amount is less than the predetermined residual amount, a control command issued.