A structure and fabrication method of nano metal wires solid capacitor

• Main Authors: YANG, HIS-WEN, CHEN, CHIENON, CHEN, CHIH-YUAN
• Format: Patent
• Language: Chinese; English
• Published: 01.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE; ELECTRICITY

There is provided a structure and fabrication method of nano metal wires solid capacitor. Titania nanotube (TiO2 NT) was first made by anodization method and then converts TiO2 NT to titanium barium acid nanotube (BaTiO3 NT) thin film. The BaTiO3 NT film which has a high dielectric constant (K) value property can be used for a capacitor. Because the BaTiO3 NT film structure includes small and large pores the capacitor internal electrodes can form on/in the pores and the external electrodes can on the film surfaces. According to the dielectric, the internal electrodes, and the external electrodes structure the parallel BaTiO3 NT capacitor can be formed. The thickness of capacitor can be controlled under several micron-meters ( m), the capacitor value can be achieved to several micron-farad ( F).