Apparatus for providing and directing heat energy in a process chamber

• Main Authors: HUNTER, AARON MUIR, JOHNSON, JOSEPH, ABRAHAM, MATHEW, GERLING, JOHN, NAINANI, ANEESH, RANISH, JOSEPH M
• Format: Patent
• Language: Chinese; English
• Published: 01.07.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Apparatus for providing heat energy to a process chamber are provided herein. The apparatus may include a process chamber body of the process chamber, a solid state source array having a plurality of solid state sources, disposed on a first substrate, to provide heat energy to the process chamber to...