Fabricating a fluid ejection device
In an embodiment, a method of fabricating a fluid ejection device includes forming on a substrate, a primer layer having a center-of-slot rib feature. The method also includes forming over the primer layer, a chamber layer that extends the center-of-slot rib. The method further includes forming over...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.03.2014
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Subjects | |
Online Access | Get full text |
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Summary: | In an embodiment, a method of fabricating a fluid ejection device includes forming on a substrate, a primer layer having a center-of-slot rib feature. The method also includes forming over the primer layer, a chamber layer that extends the center-of-slot rib. The method further includes forming over the chamber layer, a first layer of a two-layer tophat that further extends the center-of-slot rib. The method then includes forming over the first layer, a second layer of the two-layer tophat. |
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Bibliography: | Application Number: TW20130121517 |