A support apparatus, a lithographic apparatus and a device manufacturing method

A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support a...

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Main Authors WESTERLAKEN, JAN STEVEN CHRISTIAAN, FIEN, MENNO, DE GROOT, ANTONIUS FRANCISCUS JOHANNES, LAFARRE, RAYMOND WILHELMUS LOUIS, DE JONG, ROB, HOOGENDAM, CHRISTIAAN ALEXANDER, OVERKAMP, JIM VINCENT, TEN KATE, NICOLAAS, DONDERS, SJOERD NICOLAAS LAMBERTUS, VAN BEIJNUM, MAARTEN, JACOBS, JOHANNES HENRICUS WILHELMUS, KOEVOETS, ADRIANUS HENDRIK, HOUBEN, MARTIJN
Format Patent
LanguageChinese
English
Published 01.02.2014
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.
Bibliography:Application Number: TW20130118695