Lithographic apparatus
A collector module is disclosed comprising: a collector for collecting radiation generated by a radiation generating plasma, and for directing at least a portion of the generated radiation; a structure upstream of the focal point and extending at least partially around an expected position of a beam...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.01.2014
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Subjects | |
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Abstract | A collector module is disclosed comprising: a collector for collecting radiation generated by a radiation generating plasma, and for directing at least a portion of the generated radiation; a structure upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation; a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised |
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AbstractList | A collector module is disclosed comprising: a collector for collecting radiation generated by a radiation generating plasma, and for directing at least a portion of the generated radiation; a structure upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation; a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised |
Author | BAAS, GERARDUS WILHELMUS PETRUS KOLESNYCHENKO, ALEKSEY YURIEVICH BEIJSENS, ROLF THEODORUS NICOLAAS KLEEMANS, NIEK ANTONIUS JACOBUS MARIA VAN AERLE, NICOLAAS ALDEGONDA JAN MARIA EURLINGS, MARKUS FRANCISCUS ANTONIUS VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS J |
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Snippet | A collector module is disclosed comprising: a collector for collecting radiation generated by a radiation generating plasma, and for directing at least a... |
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SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY COLORIMETRY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS RADIATION PYROMETRY TESTING |
Title | Lithographic apparatus |
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