Lithographic apparatus

• Main Authors: VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS J, BEIJSENS, ROLF THEODORUS NICOLAAS, EURLINGS, MARKUS FRANCISCUS ANTONIUS, KOLESNYCHENKO, ALEKSEY YURIEVICH, KLEEMANS, NIEK ANTONIUS JACOBUS MARIA, VAN AERLE, NICOLAAS ALDEGONDA JAN MARIA, BAAS, GERARDUS WILHELMUS PETRUS
• Format: Patent
• Language: Chinese; English
• Published: 16.01.2014
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; COLORIMETRY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RADIATION PYROMETRY; TESTING

A collector module is disclosed comprising: a collector for collecting radiation generated by a radiation generating plasma, and for directing at least a portion of the generated radiation; a structure upstream of the focal point and extending at least partially around an expected position of a beam comprising the at least a portion of the collected radiation; a diffractive element being arranged to diffract infrared radiation that is reflected from the plasma formation location. When the plasma formation location is at an intended location, m = +1 diffracted infrared radiation is directed towards a first region of the structure. At m = -1 diffracted infrared radiation is directed towards a second region of the structure. Also disclosed is an infra-red detector with increased dynamic range obtained by providing a screen for forming an image of a hotspot and a camera directed on to the screen. The dynamic range of the detector is improved either by heating the screen such that a low intensity hotspot is raised