Alumina sintered body, member including the same and semiconductor manufacturing apparatus

• Main Authors: ITO, YOICHI, SAWAMURA, TAKENORI, TSUJI, MASAKI, TOSA, AKIFUMI
• Format: Patent
• Language: Chinese; English
• Published: 16.01.2014
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CABLES; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; CONDUCTORS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INSULATORS; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; SLAG; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TREATMENT OF NATURAL STONE

The problem to be solved is to obtain an alumina sintered body having the desired volume resistivity while suppressing the complication of the processes and suppressing the amount of titanium oxide added to alumina. The solution is to provide an alumina sintered body containing alumina as a main component and a titanium element. The alumina sintered body further contains at least one element selected from a lanthanum element, a neodymium element and a cerium element. An aluminum element is contained in an amount such that a ratio of aluminum oxide to total oxides when being converted into oxides becomes 93.00 to 99.85% by weight. The titanium element is contained in an amount such that a ratio of titanium oxide to total oxides becomes 0.10 to 2.00% by weight. The lanthanum element, the neodymium element and the cerium element are contained in a total amount such that a ratio of the total amount of lanthanum oxide, neodymium oxide and cerium oxide to total oxides becomes 0.05 to 5.00% by weight. The volume res