Adhesive sheet for manufacturing semiconductor device, and semiconductor device manufacturing method using the same

An adhesive sheet (10) for manufacturing a semiconductor device is provided, wherein the adhesive sheet is a peelable sheet which is adhered to a lead frame (20) or a circuit board of a semiconductor device, wherein the adhesive sheet includes a substrate and an adhesive layer which includes a fluor...

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Bibliographic Details
Main Authors KASUGA, HIDEMASA, MACHII, SATORU, YAMAI, ATSUFUMI
Format Patent
LanguageChinese
English
Published 16.12.2013
Subjects
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Summary:An adhesive sheet (10) for manufacturing a semiconductor device is provided, wherein the adhesive sheet is a peelable sheet which is adhered to a lead frame (20) or a circuit board of a semiconductor device, wherein the adhesive sheet includes a substrate and an adhesive layer which includes a fluorine-containing agent and is provided on one surface of the substrate, and the surface fluorine recovery rate of the adhesive layer which is represented by the following formula (I) is 70% or more; surface fluorine recovery (%) = surface fluorine content after recovery / initial surface fluorine content * 100 (I).
Bibliography:Application Number: TW20132110258