Cryopump system, and method of operating the same, and compressor unit

A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit of a working gas for the cryopump, a gas line connecti...

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Bibliographic Details
Main Author MATSUI, TAKAAKI
Format Patent
LanguageChinese
English
Published 16.10.2013
Subjects
BLASTING
COMBINED HEATING AND REFRIGERATION SYSTEMS
HEAT PUMP SYSTEMS
HEATING
LIGHTING
LIQUEFACTION SOLIDIFICATION OF GASES
MANUFACTURE OR STORAGE OF ICE
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
REFRIGERATION MACHINES, PLANTS OR SYSTEMS
REFRIGERATION OR COOLING
SEPARATION
TRANSPORTING
WEAPONS
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Summary:A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit of a working gas for the cryopump, a gas line connecting the cryopump and the compressor unit, a gas volume adjuster configured to increase a quantity of the working gas in the gas line during the vacuum pumping operation in comparison with that during the preparatory operation, and a control device configured to control the compressor unit so as to provide a pressure control for the gas line.
Bibliography:Application Number: TW20120146857