Semiconductor device and manufacturing method of a semiconductor device

• Main Authors: HUANG, YU-LING, TSENG, CHUNIAO, AI, CHUNG-YUNG, HUANG, CHUN-HUA, TANAKA, YOSHINORI, CHANG, WEI, FANG, HSUAN-YU, TAKESAKO, KAZUAKI, HSU, WEN-KUEI, NAGAI, YUKIHIRO, HSU, YU-SHAN, HSIUNG, CHIH-WEI, CHEN, MENG-HSIEN, KADOYA, TOMOHIRO, FUJITA, HIROTAKE, LIU, WEIIH
• Format: Patent
• Language: Chinese; English
• Published: 16.09.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device comprises: a substrate having a base and an array of semiconductor pillars extending upwardly from the base and arranged in rows, the substrate being formed with a plurality of trenches, each of which is disposed between two adjacent rows of the semiconductor pillars and each...