Co-based alloy sputtering target and co-based alloy material for magnetic recording media

• Main Authors: HSUEH, YUNGUN, LIAO, HAOIA, ROU, SHANG-HSIEN, KUO, SHIH-MING
• Format: Patent
• Language: Chinese; English
• Published: 16.09.2013
• Subjects: ALLOYS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; FERROUS OR NON-FERROUS ALLOYS; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF ALLOYS OR NON-FERROUS METALS

The present invention provides a Co-based alloy sputtering target. The sputtering target comprises a Co-based alloy phase and a nonmagnetic ternary compound phase including at least one nonmagnetic ternary compound. In addition, the present invention also provides a Co-based alloy material, which is sputtered by using the afore-mentioned sputtering target. Because the nonmagnetic ternary compound is segregated at the grain boundary of cobalt-based alloy grains, it can be used for isolating the magnetic exchange coupling between cobalt-based alloy grains. Because the highly stability of nonmagnetic ternary compound, the required thickness of the grain boundary layer for isolating the magnetic exchange coupling can be reduced. Thus, using the Co-based alloy sputtering target to produce the Co-based alloy material can highly improve the signal-to-noise ratio of the magnetic recording media.