Clean air blower unit

• Main Author: NAKAO, TATSUO
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2013
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BLASTING; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; HANDLING THIN OR FILAMENTARY MATERIAL; HEATING; LIGHTING; MECHANICAL ENGINEERING; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; RANGES; STORING; TRANSPORTING; VENTILATING; WEAPONS

The object of the present invention is to provide a clean air blower unit that enables clean air to properly flow from a clean air supply face to an air discharge face and that enables the cleaning of a substrate receptacle to be well conducted. The solution means of the present invention is that a clean air blower unit that is mounted in a manner of being detachable from a substrate receptacle, the substrate receptacle is protected in a receptacle of the protection device, which comprises: a fan filter unit, in which one of the four side faces of the substrate receptacle can be used as a clean air supply face and the side face that is opposite to the clean air supply face can be used as an air discharge face then clean air is conducted from the clean air supply face to the air discharge face; and a pair of the shielding plates that shield two of the four side faces of the substrate receptacle other than the clean air supply face and the air discharge face.