Motor, design method and manufacturing method of motor, stage device, and exposure apparatus

• Main Author: MORIMOTO, SHIGERU
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2013
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRICITY; ELECTROGRAPHY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERATION; HOLOGRAPHY; INDUCTANCES; MAGNETS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSFORMERS

A distribution of an element to improve coercivity for each magnet is decided, based on analysis results of magnetic fields within a plurality of magnets (M26 and the like), and by structuring each of the plurality of magnets based on the distribution, it becomes possible to realize a permanent magnet having strong magnetic force and high heat-resisting performance whose residual magnetic flux density and coercivity are both improved, using a small amount of an element which improves coercivity. And, by designing a magnet unit using the permanent magnet, and a motor using the magnet unit, it becomes possible to obtain a motor with high performance.