Cryopump system, compressor, and method for regenerating cryopumps

A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas...

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Bibliographic Details
Main Author MATSUI, TAKAAKI
Format Patent
LanguageChinese
English
Published 16.02.2013
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas in the compressor during the heating operation than the temperature thereof during the cooling operation. The compressor may include a heat exchanger for cooling operating gas to be supplied to the refrigerator, and a bypass passage that circumvents the heat exchanger. The control unit may switch, in accordance with the operation status of the refrigerator, between a flow passage that passes through the heat exchanger and a flow passage that passes through the bypass flow passage.
Bibliography:Application Number: TW20120111058