Liquid heating unit, liquid processing apparatus including the same, and liquid processing method
Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by permeation of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heate...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.02.2013
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by permeation of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member having a cylindrical shape made of material permeating the radiated light configured to insert and penetrate the lamp heater into an internal space; a liquid conduction part placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein by using the radiated light; a reflection plate covering the liquid conduction part from the outside and reflecting the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate. |
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Bibliography: | Application Number: TW20110132067 |