Liquid heating unit, liquid processing apparatus including the same, and liquid processing method

Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by permeation of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heate...

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Bibliographic Details
Main Authors ESHIMA, KAZUYOSHI, NISHIDA, TOSHIHIKO, NAKAYAMA, HISAKAZU
Format Patent
LanguageChinese
English
Published 01.02.2013
Subjects
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Summary:Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by permeation of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member having a cylindrical shape made of material permeating the radiated light configured to insert and penetrate the lamp heater into an internal space; a liquid conduction part placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein by using the radiated light; a reflection plate covering the liquid conduction part from the outside and reflecting the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate.
Bibliography:Application Number: TW20110132067