Vacuum processing apparatus

• Main Authors: TADA, ISAO, HAYASHI, NOBUHIRO, HIRONO, TAKAYOSHI, FUJIMOTO, SHINYA
• Format: Patent
• Language: Chinese; English
• Published: 16.12.2012
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVEYING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PACKING; PERFORMING OPERATIONS; STORING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

Provided is a vacuum film-forming apparatus, which has a vacuum processing chamber and auxiliary vacuum chambers separately configured to be convenient for transport and the like, and which is easily assembled at an installation site, and has excellent maintainability. The vacuum film-forming apparatus is configured by consecutively installing: a vacuum processing chamber (1), which has a drum (15) having a part of a long sheet-like base material (S) wound thereon, a plurality of rollers (16c), which are disposed below the drum and transfer the sheet-like base material from the upstream, and a processing unit (4); an upstream auxiliary vacuum chamber (2) that feeds the sheet-like base material to a vacuum processing chamber; and a downstream auxiliary vacuum chamber (3) that takes up and recovers the sheet-like base material. The vacuum processing chamber and the auxiliary vacuum chambers are respectively demarcated by disposing bottom-opened box bodies with the bottom side on the base plates, which are place