Solar cell with gradual-variation inner stress and method to manufacture the same

• Main Authors: WU, CHING-IN, LIN, KUNIH, CHANG, CHIH-HSIUNG, CHUANG, KAI-HSIANG
• Format: Patent
• Language: Chinese; English
• Published: 01.12.2012
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

A solar cell with a gradual-variation inner stress includes a first electrode layer, a first type semiconductor layer, a first intrinsic layer, a transitional layer, a second intrinsic layer, a second type semiconductor layer and a second electrode layer plied sequentially. When sequentially forming the first intrinsic layer, the transitional layer and the second intrinsic layer via a deposition process, hydrogen gas and silicon hydrogen compound gas is applied in accordance with the condition that the flows of hydrogen gas to silicon hydrogen compound gas are respectively in a first flow proportion, a gradual-variation flow proportion and a second flow proportion, so as to make the first intrinsic layer, the transitional layer and the second intrinsic layer respectively have a first inner stress, a gradual-variation inner stress and a second inner stress.