Sputtering target for forming magnetic recording medium film and method for producing same

• Main Authors: ISHIYAMA, KOUICHI, NONAKA, SOHEI, YOSUKE, MASANORI, MATSUZAKI, HIDEHARU
• Format: Patent
• Language: Chinese; English
• Published: 16.11.2012
• Subjects: ALLOYS; BASIC ELECTRIC ELEMENTS; CASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; FERROUS OR NON-FERROUS ALLOYS; INDUCTANCES; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAGNETS; MAKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; METALLURGY; PERFORMING OPERATIONS; PHYSICS; POWDER METALLURGY; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSFORMERS; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WORKING METALLIC POWDER

Provided are: a sputtering target that is for forming a magnetic recording medium film, is able to form a film having a low ordering temperature, and can suppress the generation of particles; and a method for producing the sputtering target. The sputtering target for forming a magnetic recording medium film comprises a sintered body having a composition represented by the general formula {(FexPt100-x)(100-y)Ay}(100-z)Cz, A being a metal comprising Au and/or Cu, and by atomic ratio, 30 = x = 80, 1 = y = 30, and 3 = z = 63. Also, the method for producing the sputtering target has a step for hot pressing a mixed powder of an AuPt alloy powder and/or a CuPt alloy powder, an AgPt alloy powder, an FePt alloy powder, Pt powder, and graphite powder or carbon black powder in a vacuum or in an inert gas atmosphere.