Porous detection chip for volatile organic compound gas and manufacturing method thereof

A porous detection chip for volatile organic compound gas and manufacturing method thereof are provided. A substrate is firstly formed with a sensing material layer doped with conductive particles, such as carbon black. Then, a barrier layer on the surface of the sensing material layer is removed by...

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Bibliographic Details
Main Authors LIN, CHE-HSIN, KU, YI-HANG
Format Patent
LanguageChinese
English
Published 16.08.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A porous detection chip for volatile organic compound gas and manufacturing method thereof are provided. A substrate is firstly formed with a sensing material layer doped with conductive particles, such as carbon black. Then, a barrier layer on the surface of the sensing material layer is removed by a chemical plasma etching technique, so as to form a plasma-processed porous surface for increasing the contact area between the pores and conductive particles in the sensing material layer and the ambient atmosphere. Thus, volatile organic compound gas can rapidly enter the pores in the sensing material layer to electrically conduct adjacent conductive particles for enhancing detection performances including detection response speed of resistance signals.
Bibliography:Application Number: TW20110103953