Planar ultracapacitor

A planar ultra-capacitor including a substrate, a carbon nanotube (CNT) thin film and a transition metal oxide layer is provided. The CNT thin film with an interdigitated pattern is deposited on the substrate. The transition metal oxide layer with the same interdigitated pattern is deposited on the...

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Bibliographic Details
Main Authors LIU, CHIIE, TSAI, DAH-SHYANG
Format Patent
LanguageChinese
English
Published 01.08.2012
Subjects
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Summary:A planar ultra-capacitor including a substrate, a carbon nanotube (CNT) thin film and a transition metal oxide layer is provided. The CNT thin film with an interdigitated pattern is deposited on the substrate. The transition metal oxide layer with the same interdigitated pattern is deposited on the CNT thin film. The planar ultra-capacitor of the present invention is capable of incorporating to the micro-electromechanical (MEMS) system more easily than the conventional ultra-capacitor having parallel electrodes, so that the application thereof is not limited.
Bibliography:Application Number: TW20110101979