Optical measuring system with illumination provided through a viod in a collecting lens

An optical measuring system includes a scatterometer in which an illumination beam is provided through an aperture in a lens used to collect light for the scattering detection. The void may be a slit in the lens, a missing portion along an edge of the lens, or another suitable void. Another detectio...

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Bibliographic Details
Main Authors ROSCROW, MOREY T. JR, TOKER, GREGORY, BRUNFELD, ANDREI, CLARK, BRYAN
Format Patent
LanguageChinese
English
Published 16.07.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An optical measuring system includes a scatterometer in which an illumination beam is provided through an aperture in a lens used to collect light for the scattering detection. The void may be a slit in the lens, a missing portion along an edge of the lens, or another suitable void. Another detection channel may be provided to detect light returning through the void in the collecting lens, for example, a profilometer may be implemented by detecting interference between reflected light returning along the illumination path and light from the illumination source.
Bibliography:Application Number: TW20110130961