Inspection machine, inspecting method and inspecting system

An inspection machine is capable for inspecting optical property and electrical property of a light emitting device. The inspection apparatus includes a substrate table, a probe mechanism, a heating apparatus, a cooling apparatus, an image-sensing apparatus, a temperature-sensing apparatus and a mov...

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Bibliographic Details
Main Authors HSIEH, HSIANGNG, HSIEH, HSIAO-LIANG, LIN, WEN-TI
Format Patent
LanguageChinese
English
Published 16.06.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:An inspection machine is capable for inspecting optical property and electrical property of a light emitting device. The inspection apparatus includes a substrate table, a probe mechanism, a heating apparatus, a cooling apparatus, an image-sensing apparatus, a temperature-sensing apparatus and a moving mechanism. The probe mechanism is capable for moving to the light emitting device to contact with the light emitting device. The heating apparatus is capable for heating the light emitting device in a first temperature range. The cooling apparatus is capable for cooling the light emitting device in a second temperature range. The image-sensing apparatus senses a light emitting image provided from the light emitting device. The temperature-sensing apparatus senses the present temperature of the light emitting device. The image-sensing apparatus is disposed on the moving mechanism, wherein the moving mechanism is capable for moving the image-sensing apparatus. An inspecting method and an inspecting system for the
Bibliography:Application Number: TW20100142174