X-ray fluorescence spectrometer and X-ray fluorescence analyzing method

• Main Authors: KITA, HIROAKI, KOBAYASHI, HIROSHI
• Format: Patent
• Language: Chinese; English
• Published: 01.06.2012
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The X-ray fluorescence spectrometer of the present invention includes a sample table (8) for a sample (S) having a crystalline structure, an X-ray source (1), a detecting unit (7) for detecting secondary X-rays (4) from the sample (S), a rotating unit (11) for rotating the sample table (8), a parallel translating unit (12) for causing the sample table (8) to undergo a parallel translational movement, a selecting unit (17) for selecting three of avoidance angles, at which diffracted X-rays can be avoided, based on a diffraction pattern obtained from the angle of rotation of the sample (S) and the intensity of secondary X-rays (4), the interval between the neighboring avoidance angles being smaller than 180 DEG, and a control unit (15) for controlling the rotational unit (11) so as to set the sample (S) at the avoidance angle at which the sample table (8) will not interfere with any other structures.