Transparent conductive film, solar cell using same, sputtering target for forming said transparent conductive film, and manufacturing method therefor

• Main Authors: YAMAGUCHI, GOU, ZHANG, SHOU-BIN, KONDOU, YUICHI, MUTSUDA, YUYA
• Format: Patent
• Language: Chinese; English
• Published: 01.10.2011
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

Provided is a transparent conductive film used in liquid-crystal display devices, electroluminescent display devices, and the like, and is particularly suitable for use in solar cells. Also provided is a solar cell using said transparent conductive film and a sputtering target suited to forming said transparent conductive film. The provided transparent conductive film, which is highly moisture-resistant, comprises oxides of aluminum, magnesium, gallium, and zinc. Between 0.7% and 7% of the metal atoms in the transparent conductive film are aluminum, between 9.2% and 25% are magnesium, between 0.015% and 0.085% are gallium, and the remainder are zinc.