Oxide vapor deposition material and high-refractive index transparent membrane

The oxide vapor deposition material of present invention is characterized in constituting by a sinter which takes indium oxide as main component and contains 0.110 to 0.538 of cerium based on the ratio of atom amount of Ce/In, and the L* value in the CIE 1976 colorimetric system is 62 to 95. Because...

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Main Authors ABE, YOSHIYUKI, WAKE, RIICHIRO, MAENO, YASUYUKI, KUWAHARA, MASAKAZU
Format Patent
LanguageChinese
English
Published 01.09.2011
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Summary:The oxide vapor deposition material of present invention is characterized in constituting by a sinter which takes indium oxide as main component and contains 0.110 to 0.538 of cerium based on the ratio of atom amount of Ce/In, and the L* value in the CIE 1976 colorimetric system is 62 to 95. Because the aforementioned oxide vapor deposition material that L* value is 62 to 95 has an optimal amount of oxygen, there could produce a high-refractive index transparent membrane, which has high transparence in visible to near-ultrared region and low resistance, that the refractive index in wavelength of 550 nm is 2.15 to 2.51 even if the introducing amount of oxygen gas to membrane-forming vacuum chamber is less, and because the introducing amount of oxygen gas is less, the composition difference between membrane and vapor deposition material could be lessen.
Bibliography:Application Number: TW20100141154