Effluent gas recovery system in polysilicon and silane plants
Purified SiHCl3 and/or SiCl4 are used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor.
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.05.2011
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Subjects | |
Online Access | Get full text |
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Summary: | Purified SiHCl3 and/or SiCl4 are used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor. |
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Bibliography: | Application Number: TW201099121648 |