Flexure guide bearing for short stroke stage

A laser processing system in which a laser beam propagates along abeam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that m...

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Bibliographic Details
Main Author KOSMOWSKI, MARK T
Format Patent
LanguageChinese
English
Published 16.11.2010
Subjects
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:A laser processing system in which a laser beam propagates along abeam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. An assembly includes at least one flexure that supports the lens and guides movement of the lens along the beam axis in response to a motive force to adjust the focal region of the laser beam relative to the work surface.
Bibliography:Application Number: TW201099105727