Purifying method for recycled P/N mixed type silicon material having unknown resistance
The invention relates to a purifying method for recycled P/N mixed type silicon material having unknown resistance. The method includes the following steps: a first step of categorizing the silicon material to a normal type silicon material or an abnormal type silicon material; a second step of fill...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.10.2010
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a purifying method for recycled P/N mixed type silicon material having unknown resistance. The method includes the following steps: a first step of categorizing the silicon material to a normal type silicon material or an abnormal type silicon material; a second step of filling material; a third step of implementing the crucible; a fourth step of vacuuming a crystal growth furnace; a fifth step of heating the crystal growth furnace; a sixth step of back-filling pressure: back-filling vacuum pressure to the heated crystal growth furnace in the fifth step with inert gas and raising the temperature within the crystal growth furnace; a seventh step of temperature lowering: lowering the temperature of the crystal growth furnace in the sixth step and performing directional solidification so that the solidified silicon material includes a recycling part and a disposal part; the eighth step of annealing the crystal growth furnace; the ninth step of cooling the annealed silicon material in the |
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Bibliography: | Application Number: TW20090110427 |