Film-forming method

• Main Authors: JIANG, YOU-SONG, SHIONO, ICHIRO, NAGAE, EKISHU, SUGAWARA, TAKUYA
• Format: Patent
• Language: Chinese; English
• Published: 01.05.2010
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A film-forming method which comprises a first irradiation step wherein the surface of a substrate (101) is irradiated with particles having an energy, a first film-forming step wherein a first film (103) is formed on the surface of the substrate (101) by using a dry process after the first irradiation step, and a second film-forming step wherein an oil repellent second film (105) is formed on the surface of the first film (103). The film-forming method enables production of an oil repellent base which has an oil repellent film having a practical wear resistance.