Decompression drying equipment

Decompression drying equipment has a chamber where a substrate is accommodated, a decompression means to decompress in the chamber, a plurality of lift pins that support the substrate from the lower side and arranged in the chamber, a lift pin lifting and lowering means to make lift pin in each grou...

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Bibliographic Details
Main Authors YAHIRO, SHUNICHI, FUTAMATA, YUUSUKE
Format Patent
LanguageChinese
English
Published 16.02.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Decompression drying equipment has a chamber where a substrate is accommodated, a decompression means to decompress in the chamber, a plurality of lift pins that support the substrate from the lower side and arranged in the chamber, a lift pin lifting and lowering means to make lift pin in each group lift up and lower down respectively independently as a plurality of lift pins for one group, a substrate temperature range detecting means that delimits temperature of the substrate that changes while being processing decompression drying in prescribed temperature range and detects it, a lift pin temperature tuning means to set to prescribed temperature included in temperature range that part where the pin of each lift pin in group came in contact with the substrate was detected by substrate temperature range detecting means, and a control means that controls a driving of the lift pin lifting up and lowering down means.
Bibliography:Application Number: TW200998118556