Spin-on graded k silicon antireflective coating
Graded absorption silicon based antireflective coating compositions are described.
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.01.2010
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Subjects | |
Online Access | Get full text |
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Summary: | Graded absorption silicon based antireflective coating compositions are described. |
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Bibliography: | Application Number: TW20090114510 |