Porosity measuring apparatus for porous dielectrics and measuring method thereof

A porosity measuring apparatus for porous dielectrics and the measuring method thereof, the measuring apparatus including: a base layer; a source layer and a drain layer separated with each other and covered on the base layer; a porous dielectric layer that has a plurality of pores and is disposed o...

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Bibliographic Details
Main Authors ZENG, JI-SHENG, PENG, DONG-QING, CAI, SHUO-WEN, QIU, DING-WEN, WANG, XUAN-KAI, XU, JIA-LIN
Format Patent
LanguageChinese
English
Published 16.10.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A porosity measuring apparatus for porous dielectrics and the measuring method thereof, the measuring apparatus including: a base layer; a source layer and a drain layer separated with each other and covered on the base layer; a porous dielectric layer that has a plurality of pores and is disposed on the top of the source layer and drain layer; and a gate layer covered on the porous dielectric layer. The measuring method of this invention performs the measurement by using the measuring apparatus of this invention and a reference transistor. The measuring method measures the electric characteristics of the reference transistor and the measuring apparatus respectively; by comparing and converting the results of the measured electric characteristics, the size, distribution density and the volume of the pores can be obtained. The invention has the advantages of simple structure, low fabrication cost, easy-to-use and quick-to-measure.
Bibliography:Application Number: TW20080113471