Coaxial lighting surface defect inspection device and method thereof

• Main Authors: ZHENG, KUN-XIAN, LIANG, FEN-YU
• Format: Patent
• Language: Chinese; English
• Published: 16.02.2009
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

This invention provides a coaxial lighting surface defect inspection device suitable for inspecting a to-be-tested surface of a to-be-tested object, and the to-be-tested surface reflects at least a portion of the light. The inspection device includes a spectroscope, a light module for emitting an original light beam to the spectroscope, a light penetrable texture module, and an image capturing module. The original light beam is partially reflected by the spectroscope to form an irradiation light beam which substantially irradiates the to-be-tested surface vertically. The texture module is disposed on the path of the original light beam and has a texture pattern. The texture pattern produces a virtual image on one side opposite to the to-be-tested object in response to the irradiation of the light beam, and the virtual image will be deformed if the to-be-tested surface has defects. The image capturing module captures the virtual image in a way substantially perpendicular to the to-be-tested surface.