Plasma-resistant ceramics with controlled electrical resistivity

Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity whi...

Full description

Saved in:
Bibliographic Details
Main Authors HE, XIAOMING, YUAN, JIE, COLLINS, KENNETH S, DUAN, REN-GUAN, SUN, JENNIFER Y, GRAVES, THOMAS, THACH, SENH
Format Patent
LanguageChinese
English
Published 16.02.2009
Subjects
ARTIFICIAL STONE
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LIME, MAGNESIA
METALLURGY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
REFRACTORIES
SLAG
TREATMENT OF NATURAL STONE
Online AccessGet full text

Cover

More Information
Summary:Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.
Bibliography:Application Number: TW200796136398