Environmental isolation system for flat panel displays
The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another compone...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.11.2008
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed. |
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Bibliography: | Application Number: TW20070146988 |